A METHOD FOR MANUFACTURING TRANSPARENT ORGANIC/INORGANIC MULTI BARRIER LAYERS

摘要

A method for fabricating a transparent organic/inorganic multi barrier coating layers is provided to expand a life span of a device by blocking moisture and oxygen with an encapsulation thin film. A method for fabricating a transparent organic/inorganic multi barrier coating layers includes the steps of: forming an organic layer(30a) on a transparent substrate through a plasma polymerization method using a CCP(Capacitively Coupled Plasma); and forming an inorganic layer(40a) on the organic layer through the plasma polymerization method using the CCP. The substrate is PEN(Polyethylene-2,6-naphthalate). The organic layer is formed by using methylcyclohexane. The inorganic layer is formed using hexamethyldisiloxane. The organic layer is formed by using an organic precursor which forms a transparent polymer. The inorganic layer is formed by using an inorganic metallic precursor having a silicon element which forms the transparent polymer.