Pattern Transformation Preventive Process Using Boron Implantation,申请号KR20010038117-传众专利搜索

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发明名称	Pattern Transformation Preventive Process Using Boron Implantation
摘要
申请公布号	KR100811370(B1)	申请公布日期	2008.04.01
申请号	KR20010038117	申请日期	2001.06.29
申请人		发明人
分类号	G03F7/38	主分类号	G03F7/38
代理机构		代理人
主权项
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