| 摘要 |
A three-way valve is provided to accurately discharge an organic body in a designated direction by blocking outlet ports formed on a barrel using air. A three-way valve has an inlet port(22) formed on an upper portion of a barrel, through which a combustible gas and an acid gas pass to form a film on a wafer, and a first outlet port(20) and a second outlet port(21) formed on a lower portion for discharging the combustible gas or the acid gas. A control cylinder is adapted to close the first outlet port or the second outlet port using air so as to selectively discharge the first and second outlet ports. A magnetic core has a core of heat wire inserted in the barrier to maintain temperature variation in the barrel.
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