TEMPLATE DERIVATIVE FORMING ULTRA-LOW DIELECTRICS AND METHOD OF FORMING ULTRA-LOW DIELECTRICS USING THE SAME

摘要

A template derivative for forming ultra-low dielectrics is provided to produce ultra-low dielectric films having excellent mechanical strength. A template derivative for forming ultra-low dielectrics is a glucose derivative represented by the following formula 1, wherein R represents (CH2)n-SiH3(wherein, n represents an integer of 1-3). The glucose derivative is formed by subjecting a reactive glucose precursor and allyl bromide to allylation, followed by performing a hydrosilylation reaction using SiH4 gas. A method of forming ultra-low dielectrics using the template derivative includes the steps of: forming film using the glucose derivative; and hardening the film in a hydrogen peroxide atmosphere.