| 摘要 |
<p>An apparatus for repairing a mask defect using a DPSS(Diode Pumped Solid State) laser is provided to enhance the quality of a mask by improving a structure thereof. A laser output unit outputs a laser beam to repair a defect of a mask. A beam expander(115) expands the laser beam outputted from the laser output unit. A plurality of mirrors(120,130,150) are used for reflecting the expanded laser beam at various angles. An aperture(140) is used for adjusting a size of the laser beam. A lens is used for adjusting a focus of the laser beam to repair a defect generated from the mask. The laser output unit is a DPSS laser unit. A sensing unit is installed at an output side of the laser output unit to sense the output of the laser output unit.</p> |
