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发明名称
Antenna for inductive coupled plasma generating apparatus
摘要
申请公布号
KR100817290(B1)
申请公布日期
2008.03.31
申请号
KR20050005543
申请日期
2005.01.20
申请人
发明人
分类号
H05H1/34
主分类号
H05H1/34
代理机构
代理人
主权项
地址
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