| 摘要 |
A calibrated micro electromechanical microphone is provided to minimize a parameter variation of an MEMS microphone by decreasing a manufacturing variation during MEMS and ASIC(Application Specific Integrated Circuit) wafer manufacturing processes. A calibrated micro electromechanical microphone includes a sound inlet hole, an MEMS(Micro Electro Mechanical System) transducer device(12), a bias voltage generator(18), a memory(30), and a processor. The MEMS transducer device includes a rear plate and a diaphragm which is displaceable with respect to the rear plate. The bias voltage generator provides a DC bias voltage between the diaphragm and the rear plate. The memory stores information. The processor searches for information from the memory, controls a gain of an amplifier according to amplifier gain setting information from the memory, and controls the bias voltage generator, so that the DC bias voltage is supplied according to the information from the memory. The amplifier receives an electrical signal from the MEMS transducer device and outputs an output signal.
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