| 摘要 |
The invention relates to a technology of applying thin layers of diamond-like carbon, which are used as hard protective wear-resistant coatings. In order to improve their adhesion, they are treated in a carbon atmosphere after their application and before opening of the vacuum chamber. The obtained thin layers of diamond-like carbon are characterized by very good adhesion and can be used as passivation coatings in electronics, optics, mechanical engineering, and also as biocompatible coatings in medicine.
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