| 摘要 |
<p>A Method for Fabricating Micro and Nano Structures A method of forming an array of selectively shaped optical elements on a substrate 30, the method comprising the steps of providing the substrate 30, said substrate having an optical layer 35 placed thereon; placing a layer 40 of particles 45 on the optical layer 35; performing an etching cycle, said cycle comprising the steps of: etching the layer of particles, using a first etching process so as to reduce the size of the particles 45 within the layer, then; simultaneously etching the optical layer and the layer of particles, using a second etching process, the further reducing particles forming a mask over areas of the optical layer to create discrete optical elements 60 from the optical layer 35.</p> |
