| 摘要 |
An optically anisotropy parameter measurement apparatus is provided to radiate a linear polarized light to an anisotropy measured target object as an incident light in a plurality of directions, set the linear polarized light in a specific direction out of linear polarized light components included in a reflection light as a measuring light, and measure the intensity of the set measuring light, thereby optically measuring anisotropy parameters such as a direction of an optical axis, an inclination angle, and the size of anisotropy. A direction of one of a P polarized light or an S polarized light is determined as a reference direction for the measured surface of a measured target object(3). A direction of an incident light and a measuring light is set as a linear polarized light which is vibrated in the reference direction. The other direction of the incident light and the measuring light is set as a pair of linear polarized lights which is vibrated in a +-delta direction for the reference direction. The light intensity of two types of measuring lights corresponding to the pair of linear polarized lights is measured. An optically anisotropy parameter is measured on the basis of difference data indicating a difference between the acquired two light intensity data. |
