| 摘要 |
CLEANING APPARATUS To prevent dew condensation of an object to be cleaned, a cleaning apparatus which cleans the object to be cleaned by ejecting a solvent from a nozzle comprises gas ejecting means for ejecting heated gas to a surface of the object to be cleaned, wherein the wing ejecting means is configured to move on the object to be cleaned when cleaning is performed, and retract from the object to be cleaned when cleaning is not performed, so that a small quantity of heated gas is ejected, and a large quantity of heated gas is ejected when cleaning is performed.
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