| 摘要 |
<p>CR-DOPED FeCoB BASED TARGET MATERIAL AND METHOD FOR PRODUCING THE SAME There is disclosed a method for producing a Cr-doped FeCoB based target material that can be used efficiently in magnetron sputtering processes and has a low magnetic permeability. In the method for producing the target material, there are firstly provided raw-materials of two or more kinds of FeCoB based alloy powders which are different in composition from each other, wherein at least one of the FeCoB based alloy powders comprises Fe and Co in a total amount of 60 atom% or more such that Fe:Co atomic ratio is within a range of 70:30 to 40:60, and comprises Cr in an amount which is from 15 to 25 atom% greater than B. Then, the two or more kinds of the FeCoB based alloy powder are mixed and consolidated to form a target material.</p> |
