TRANSFER ROBOT FOR SUBSTRATE

摘要

A substrate transferring robot is provided to prevent scratch or sliding of a substrate by mounting an o-ring made of elastic member on a robot hand. A substrate transferring robot includes a robot hand(1), on which a substrate is loaded, and at least one elastic member(24) coupled to the upper surface of the robot hand. The elastic member is detachably coupled to the upper surface of the robot hand by a fixing member. The fixing member has a flange with an O-ring for receiving an O-ring, and a fastening member for fastening the flange to the robot hand. The flange has an outer flange(22) seated in a recessed portion formed on the upper surface of the robot hand, and an inner flange(23) positioned in the outer flange.