发明名称 INSPECTING DEVICE FOR SOLAR BATTERY ELECTRODE, AND INSPECTING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an inspecting device and a method of inspecting electrode quality with accuracy after formation process of a double layer electrode for improving an yield in manufacturing of a solar battery with respect to the solar battery having the electrode with double layer structure. <P>SOLUTION: The inspecting device for solar battery electrode, by which a finger electrode 3 formed at the solar battery is inspected, includes a current power supply for feeding current to the finger electrode 3 through a current feeding terminal 4, and a voltage measuring device for measuring potential difference in a desired zone of the finger electrode 3 through a voltage measurement terminal 5. In this case, the voltage measurement terminal 5 is provided at a position where the potential difference in the desired zone is measured. Each current feeding terminal 4 is provided with the voltage measurement terminal 5 in between. The solar battery electrode inspecting device includes a resistor computer for calculating a resistance value in the desired zone of the finger electrode 3 from a current value and the potential difference, and a judgement device for judging conduction of the finger electrode 3 from the obtained resistance value. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008071989(A) 申请公布日期 2008.03.27
申请号 JP20060250375 申请日期 2006.09.15
申请人 SHIN ETSU HANDOTAI CO LTD;SHIN ETSU CHEM CO LTD 发明人 IKUSHIMA SATOYUKI;OTSUKA HIROYUKI;ISHIKAWA NAOKI
分类号 H01L31/04 主分类号 H01L31/04
代理机构 代理人
主权项
地址