| 摘要 |
PROBLEM TO BE SOLVED: To provide a shield case in which a minimum distance in tight contact with a gasket can be secured on a top plate from the viewpoint of air tightness, and a MEMS microphone having the shield case. SOLUTION: The shield case of the present invention shields a MEMS chip mounted on a substrate from the outside and comprises a top plate and a plurality of side face plates and thickness of each of the plurality of side face plates is greater than thickness of the top plate. Thus, the area of the top plate can be widened in comparison with the conventional shield case having uniform thickness. Therefore, the area bringing the gasket into tight contact with the top plate can be secured without changing a position/size/range or the like of a chucking area from the conventional shield case. COPYRIGHT: (C)2008,JPO&INPIT |
