| 摘要 |
PROBLEM TO BE SOLVED: To provide a resizing method of further high precision drawing pattern against the size variation produced by the loading effect. SOLUTION: The resizing method of drawing pattern includes a calculation process (S102) to caluculate a first amount of size correction of a pattern to correct the size error of the pattern produced by the loading effect for every small region based on the area density of every small region in which the drawing region of a test piece is virtually devided into a mesh-like shape in a predetermined size, a calculation process (S104) to calculate a second amount of size correction corresponding to the linewidth size of the pattern drawn in the small region, a correction process (S106) to correct the first amount of size correction using the second amount of size correction, and a resizing process (S108) to resize the linewidth size of the pattern using the corrected first amount of correction, Therefore, the resizing of further high precision pattern against the size variation produced by the loading effect can be carried out. COPYRIGHT: (C)2008,JPO&INPIT
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