| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece holder for fixedly holding a workpiece with a working surface as reference, releasing the holding of the workpiece while a holding part is fixed, and preventing a gap from occurring between a movable region of the holding part and concave and convex surfaces of a fixed region even if the fixing of the holding part is released. SOLUTION: The workpiece holder has at least one of a pair of holding parts linearly moving toward the other holding part for holding the workpiece. The holding part includes: the movable region 4 having a convex surface 5c on an opposite surface to a surface in contact with the workpiece; the fixed region 7 for holding the convex surface of the movable region by a concave surface 8c with an approximately same diameter; and a supporting shaft 10 for supporting the movable region and the fixed region. Spherical surfaces facing the movable region and the fixed region, are tightly fixed by bringing back and forth a clamp block 11 engaging with the movable region by movement of the supporting shaft, causing the workpiece to be fixedly held on the surface of the movable region in contact with the workpiece. COPYRIGHT: (C)2008,JPO&INPIT
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