METHOD FOR PRODUCING POROUS COMBINED STRUCTURE AND POROUS FINE PARTICLE TO BE USED FOR THE PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a structure or a film having minute continuous pores on a substrate. SOLUTION: A porous fine particle is formed by firing brittle material superfine particles having <0.1μm average particle diameter so that brittle material superfine particles are combined partially with one another. A porous combined structure is formed by dispersing the porous fine particles in a gas to obtain aerosol and blowing the obtained aerosol against the substrate to make the porous fine particles collide with the substrate and combine the porous fine particles with one another so that the combined porous fine particles are accumulated on the substrate. COPYRIGHT: (C)2008,JPO&INPIT