| 摘要 |
PROBLEM TO BE SOLVED: To provide an operation control device of a plurality of vacuum pumps and a method, capable of reducing repairing work man-hours, by reducing a maintenance frequency, by restraining an increase in facility cost, by eliminating the problem by use of a vacuum sensor and control by an inverter. SOLUTION: This operation control device has an electric current detecting means 5 detecting an electric current flowing to motors M<SB>A</SB>, M<SB>B</SB>and M<SB>C</SB>driving the pumps P<SB>A</SB>, P<SB>B</SB>and P<SB>C</SB>, and a control means 11 reducing the operation pump number of the plurality of vacuum pumps P<SB>A</SB>, P<SB>B</SB>and P<SB>C</SB>by determining as a state of being a vacuum or near to the vacuum when converged in a predetermined electric current range, based on an electric current value from the electric current detecting means 5, and also has an operation pump control means 11 successively transferring a monitoring motor in a plurality of motors, by determining by an electric current value of its motor by setting one of the plurality of pumps as the monitoring motor. COPYRIGHT: (C)2008,JPO&INPIT
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