| 摘要 |
<p>[PROBLEMS] To realize a heat treatment apparatus that attains effective prevention of any deposition of sublimation products occurring during heat treatment. [MEANS FOR SOLVING PROBLEMS] When substrate (3) is heated, resin sublimation or solvent evaporation from a resist liquid, etc. applied to the surface of the substrate (3) would occur to cause condensation on fluororesin coating (11) forming an inferior surface of top panel (10). The condensate has a minute diameter due to the formation on the surface of the fluororesin coating (11), and further the fluororesin coating is slippery. Thus, the condensate would travel along the slope thereof and fall downward from an end portion of the top panel (10). The position where condensate drops fall lies outside the substrate (3), so that the condensate would not cause lowering of yield.</p> |
