| 摘要 |
PROBLEM TO BE SOLVED: To provide a member, especially a sliding member, having a low friction, and excellent adhesiveness and load resistance. SOLUTION: The member has an intermediate layer containing aluminum and carbon on a base material, and a hard carbon film on the intermediate layer. In the intermediate layer, the content of aluminum is gradually reduced toward the hard carbon film from the base material, the content of carbon is gradually increased toward the hard carbon film from the base material, and at the same time, Al<SB>4</SB>C<SB>3</SB>, in which aluminum and carbon are bonded in a molar ratio of 4:3, is formed in the base material side from the center of the intermediate layer. In the hard carbon film, aluminum is contained in an amount of 0.5-4.5 atom%. COPYRIGHT: (C)2008,JPO&INPIT |
