MICRO-NANO PROJECTION STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a new characteristic micro-nano projection structure and a method for manufacturing the structure. SOLUTION: The micro-nano projection structure is made of copper oxide formed in an irradiation region and a non-irradiation region with high energy beams on metal copper heated in air. The method for manufacturing a micro-nano structure comprises: forming acicular copper oxide on an inner wall 11 of a circular hole 1 by heating a metal copper plate or metal copper having a circular through-hole 1, irradiating the inner wall 11 with high energy beams in a low vacuum state and growing and forming projections made of copper oxide and having a circular cross section from the acicular copper oxide as a nucleus in the irradiation region with the high energy beams. The method for manufacturing a micro-nano structure comprises growing and forming projections made of copper oxide and having a square cross section in a non-irradiation region with high energy beams. COPYRIGHT: (C)2008,JPO&INPIT