| 摘要 |
PROBLEM TO BE SOLVED: To provide a machining apparatus which accurately detects the contact of a transparent workpiece, such as an electrically non-conductive glass substrate, with a tool. SOLUTION: The machining apparatus processes the surface of a transparent workpiece W by means of the tool T while relatively moving the tool T and the workpiece W by means of a relative movement mechanism 10, and comprises: an evanescent light generating means 30 for generating evanescent light on the surface of the workpiece W; an evanescent light detecting means 40 for detecting the scattered light of the evanescent light generated on the surface of the workpiece W; and a display means (display section) for displaying the output from the evanescent light detecting means 40. COPYRIGHT: (C)2008,JPO&INPIT
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