| 摘要 |
PROBLEM TO BE SOLVED: To reduce the frequency of attaching and detaching components in a clean space in a fan filter unit. SOLUTION: A suction port is provided on the upper part of a box-shaped chamber 5, a fan unit 4 comprising a fan 2 and a motor 3 is provided inside the chamber 5, and a sterilization lamp 8 reproducing a photocatalyst chemical filter 6 is disposed inside the chamber 5 and is installed at such a place that light emitted from the sterilization lamp effectively gets to the photocatalyst chemical filter 6. By irradiating the photocatalyst chemical filter 6 with the sterilization lamp 8 every time, since harmful components or the like caught by the photocatalyst chemical filter 6 carrying a titanium oxide catalyst can be decomposed, the service life of the filter is prolonged and the exchange frequency of the filter is reduced. COPYRIGHT: (C)2008,JPO&INPIT
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