| 摘要 |
PROBLEM TO BE SOLVED: To provide the inclination correcting device in a nano-writing apparatus, capable of precisely and efficiently arranging a multiprobe, in parallel with the surface of an object of drawing. SOLUTION: The inclination correcting device is equipped with a displacement forming part (6) which has a fixing part (61), elastic parts (62), a movable part (63), a drive part (64) and a fulcrum part (65), and a laser irradiating part for irradiating laser beam on the back surfacess of the cantilevers, positioned at both ends of the multiprobe and detecting the reflected laser beam. The fixing part (61) is fixed to the Z-axis direction coarse adjustment part of the nano-writing apparatus, and the laser irradiation part is fixed to the movable part (63); while the multiprobe is fixed to the laser irradiation part and the elastic parts (62), respectively independently add the restoring force corresponding to the displacement quantity, to the fixing part (61) and the movable part (63). The drive part (64) applies a force to the movable part (63), and the movable part (63) is made to rotate about the fulcrum part (65) by a prescribed angle, to make the inclination of the multiprobe changed. COPYRIGHT: (C)2008,JPO&INPIT
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