| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm vacuum pump manufacturable at low cost in spite of its compactness. SOLUTION: In this diaphragm vacuum pump, vacuum pumping is enabled while repeating suction and exhaust by a tilted pin running idle toward the center of rotation of a motor while separating a specified distance from the center of rotation of the motor, a rolling plate joined to the tilted pin and performing an eccentric vertical oscillating motion, and a three-point diaphragm joined to the rolling plate and contracting/expanding the internal volume by the eccentric vertical oscillating motion. COPYRIGHT: (C)2008,JPO&INPIT
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