SEMICONDUCTOR DEVICE WITH AN INDUCTOR TO PREVENT FROM PLASMA DAMAGE,申请号KR20020080759-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE WITH AN INDUCTOR TO PREVENT FROM PLASMA DAMAGE
摘要
申请公布号	KR100817409(B1)	申请公布日期	2008.03.27
申请号	KR20020080759	申请日期	2002.12.17
申请人		发明人
分类号	H01L27/02	主分类号	H01L27/02
代理机构		代理人
主权项
地址

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