| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method related to a resist coating device that reduces the inner volume of a resist filter for cleaning resist piping easily, reliably, and safely. SOLUTION: In the cleaning method of the resist piping of the resist coating device, a tool that does not incorporate any filters and has a recess 22 that is shallower than a recess is fitted the resist coating device having pipes 16, 17 and 18 in place of a tool having the recess for storing a filter connected to the pipes 16, 17 and 18. COPYRIGHT: (C)2008,JPO&INPIT
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