发明名称 SEMICONDUCTOR MEMORY AND METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor memory whose ferroelectric capacitor area can be increased. SOLUTION: The semiconductor memory comprises a lower electrode 4, a first insulating region 41 formed in the same layer of the lower electrode 4 and laying out the lower electrode 4, ferroelectric films 5 formed on the lower electrode 4 and the first insulating region 41, an upper electrode 6 formed on the ferroelectric film 5, a second insulating region 61 formed in the same layer of the upper electrode 6 and laying out the upper electrode 6, and transistors T1, T2, T3 and T4 sandwiching a channel region and having first impurity regions 11a, 11c and 11e connected to the lower electroc 4 and second impurity regions 11b, 11d connected to the upper electrode 6. The adjacent ferroelectric capacitors C1, C2, C3 and C4 share either the upper electrode 6 or the lower electrode 4. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008071897(A) 申请公布日期 2008.03.27
申请号 JP20060248459 申请日期 2006.09.13
申请人 TOSHIBA CORP 发明人 KUMURA YOSHINORI;OZAKI TORU;KUNISHIMA IWAO
分类号 H01L21/8246;H01L27/105 主分类号 H01L21/8246
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