| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor having an oxide semiconductor thin film as a gas-sensing film and being enhanced in the detection sensitivity of VOCs (volatile organic compounds) of low concentration. SOLUTION: The gas sensor has a pair of electrodes formed on an insulating board and the oxide semiconductor thin film, formed on the insulating board so as to cover a pair of the electrodes, and the oxide semiconductor thin film contains disk-shaped tungsten oxide particles (preferably, the diameter is100-300 nm, and the thickness is 20-70 nm). COPYRIGHT: (C)2008,JPO&INPIT
|
