Ultraschallmotor und Verfahren zur Herstellung eines Ultraschallmotors

摘要

[Purpose] The present invention relates to an ultrasonic motor having a stator which includes a piezoelectric element for moving a rotor in a prescribed direction by applying a predetermined ultrasonic voltage thereto, and the rotor which is fixed to the stator by a frictional force, and a method for manufacturing an ultrasonic motor, and it has for its purpose to attain decrease of dust appearance by enhancement of a wear resistance, a different hardness, or the like in such a way that a contact part of at least either of a stator and a rotor which constitute the ultrasonic motor is irradiated with ions. [Constitution] An ultrasonic motor characterized in that either or both of contact parts of a stator and a rotor is/are irradiated with ions, thereby to enhance a wear resistance of the contact part or parts.