| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treating device suitable for conveniently and safely treating a dry etching exhaust gas, and a method for treating the dry etching exhaust gas using the treating device. <P>SOLUTION: The dry etching exhaust gas treating device, wherein a processing agent and an absorbent medium are loaded in stratified state in a container having an exhaust gas introducing inlet at a lower portion and a treating gas discharging outlet and an indicator at an upper portion, is provided. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
