| 摘要 |
PROBLEM TO BE SOLVED: To soak a material to be processed while preventing air bubbles from being attached to the material. SOLUTION: A target 10 including a substrate having a through hole and a metallic foil stuck to a first surface 21 of the substrate to close the through hole to make wiring is soaked in a process liquid 20. Before soaking the target 10 in the process liquid 20, the liquid 20 is supplied to a second surface 22 opposite to the first surface 21 of the substrate to reserve the liquid 20 in the through hole closed by the metallic foil. COPYRIGHT: (C)2008,JPO&INPIT
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