| 摘要 |
PROBLEM TO BE SOLVED: To provide a DMD (Digital Micromirror Device) which is easily manufactured without needing any complicated design of an electric circuit and is provided with a micromirror having a high speed responsiveness, and to provide a projector which can be manufacture in a small working load by providing the DMD. SOLUTION: In the DMD 8 having manya fine micromirrors 2, the micromirrors 2 are held in a space above a substrate 4 by a sheet type photoinduced bending plastic 3 which is bent by the iradiation of light having a first wavelength and recovers the original form by the radiation of light having a second wavelength. COPYRIGHT: (C)2008,JPO&INPIT
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