发明名称 METHOD OF REMOVING ORGANIC COATING
摘要 PROBLEM TO BE SOLVED: To provide a method of efficiently removing an organic coating from a base material while preventing deterioration of peelability of the organic coating. SOLUTION: In allowing the organic coating adhering to the base material to contact a peel solution consisting of an organic solvent and having undergone regeneration treatment through ozonization to attain the removal, the peel solution is allowed to contact the organic coating while maintaining the total content of carboxylic acid component and carboxylic ester component in the peel solution of 30 mass% or low. As the peel solution, an alkylene carbonate such as ethylene carbonate or propylene carbonate is used. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008071772(A) 申请公布日期 2008.03.27
申请号 JP20050042775 申请日期 2005.02.18
申请人 TOAGOSEI CO LTD 发明人 NIITSUMA HIROSHI;IINUMA TOMOHISA
分类号 H01L21/304;B08B3/08;G02F1/13;G03F7/42;H01L21/027 主分类号 H01L21/304
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