SYSTEM FOR STRIPPING AND RECOVERING RESIST, AND RESIST SEPARATION DEVICE AND RESIST RECOVERY TANK USED FOR THE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system for stripping and recovering a resist for efficiently separating and recovering a resist while avoiding the increased scale of the device, and to provide a resist separating device and a resist recovery tank used for the system. SOLUTION: The system for stripping and recovering the resist includes as constituents: a stripping liquid tank configured in such a manner that a stripping liquid is injected for separating the resist from a belt-like product during conveyance and the product is immersed in the liquid, or a stripping liquid tank configured in such a manner that a stripping liquid is injected for separating a resist from each product during conveyance, an externally driven roller conveyer to convey each product is placed inside and the product is immersed in the stripping liquid; a resist separating device 20 where the mixture of the stripping liquid and the resist separated from the product in the stripping liquid tank flows in and the resist and the stripping liquid which are made to flow in are separated from each other; and a resist recovery tank 40 where the resist separated from the resist separating device and attended with a little amount of the stripping liquid flows in and the resist stripping liquid is separated from the resist which is made to flow in and the resist is recovered. COPYRIGHT: (C)2008,JPO&INPIT