| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate storage facility capable of maintaining high degree of cleanliness of a substrate and suppressing increase of costs of the facility. SOLUTION: The operation of a storage container conveyance device 8 for conveying a storage container 2 into a carrying-in/out of warehouse part and a storage part 4 at the storage shelf 5 is controlled to store the storage container 2 in the storage part 4 while a side where a fan filter unit 64 of the storage container 2 is mounted is positioned on a movable space side and a doorway side of the storage container 2 is positioned on a side where it leaves the movable space. COPYRIGHT: (C)2008,JPO&INPIT
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