| 摘要 |
A single crystal unimorph based accelerometer has a housing base portion with a base portion bottom surface that includes two separate metallization areas. One of the two separate metallization areas is electrical active. The other is a ground electrical connection. A housing top portion is coupled to the housing base portion. A piezoelectric single crystal is positioned between the housing base portion and the housing top portion. The piezoelectric single crystal has a metal shim that forms a unimorph bonded with a metal loaded electrical conductive epoxy, and forms an electrical connection at a top electroding surface of the piezoelectric single crystal. The piezoelectric single crystal includes a cantilevered free portion that extends to the housing base portion At least a portion of the top electroding surface of the piezoelectric single crystal provides for tuning of capacitance and is an active electrical connection for the unimorph. At least a portion of a bottom surface forms the electrical ground connection. The housing base metallization areas are coupled by an electrical connector to a piezoelectric single crystal electrical connection.
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