发明名称 SWITCHING DEVICE AND TESTING APPARATUS
摘要 <p>Disclosed is a switching device for electrically connecting and disconnecting a first terminal and a second terminal. The switching device comprises a semiconductor layer, a drain electrode formed on the semiconductor layer and connected to the first terminal, a source electrode formed on the semiconductor layer and connected to the second terminal, a gate insulating film formed on the semiconductor layer between the drain electrode and the source electrode, a floating gate formed on the gate insulating film for holding electric charges therein, and a tunnel gate formed on the floating gate for charging or discharging the floating gate by flowing a tunnel current according to the driving voltage applied thereto.</p>
申请公布号 WO2008035532(A1) 申请公布日期 2008.03.27
申请号 WO2007JP66267 申请日期 2007.08.22
申请人 ADVANTEST CORPORATION;OKAYASU, TOSHIYUKI 发明人 OKAYASU, TOSHIYUKI
分类号 H01L21/822;G01R31/28;H01L21/8247;H01L27/04;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/822
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