| 摘要 |
<p>A polarization measuring device includes: a polarized light projection unit (1); a polarized light reception unit (2); and a transmission optical system (4) which collects the polarized light from the polarized light projection unit (1) so as to apply it to a plane under test (3), collects the light reflected by the plane under test (3), and introduces it to the polarized light reception unit (2). The transmission optical system (4) includes an optical axis of the polarized light applied from the polarized light projection unit (1) to the plane under test (3) and an optical axis of the light reflected from the plane under test (3) and introduced to the polarized light reception unit (2) which are arranged symmetrically about a center axis O of the same optical system and configured so that they intersect at least once. The polarized light projection unit (1) includes an intensity distribution uniformizing optical system (1c) for uniformizing the intensity distribution of the light emitted from a light source (1a). A light flux cross section of a predetermined range at a pupil position (1d) of the intensity distribution uniformizing optical system (1c) is projected to the plane under test (3).</p> |
