BEAM MACHINING APPARATUS AND BEAM OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a beam machining apparatus capable of machining an object in an extensive range with a simple constitution.

SOLUTION: A beam machining apparatus 1 comprises: a beam emission source 13 for emitting beams for machining a work 2; a vacuum chamber 3 having a first path 34 for passing the beams emitted from the beam emission source 13 therethrough; a local vacuum chamber 27 which is communicated with the first path 34 and has a second path 40 for passing the beams passing through the first path 34 and an emission aperture 78a for emitting the beams toward the work 2; and a detection means having a member to be irradiated 53 arranged in the emission aperture 78a or the like for detecting the beam irradiation position. The beam machining apparatus 1 machines the work 2 with at least a part thereof being arranged in the vacuum chamber 3 and in the atmospheric pressure outside the local vacuum chamber 27 by using the beams.

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