| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment method for preventing a substrate from being polluted while suppressing increase of cost when manufacturing the treated substrate. SOLUTION: When the substrate is stored at a storage shelf 5 and is conveyed by a storage container conveyance device 8, a lid of a storage container 2 is closed to ventilate by a fan filter unit, thereby maintaining high degree of cleanliness of the substrate. When the substrate is conveyed by a substrate conveyance device 7 in a substrate coming-in-and-out part 6, the lid of the storage container 2 is opened to ventilate by the fan filter unit and maintain high degree of cleanliness in a substrate conveyance area 24 by a cleaning air ventilating means 25 for the conveyance area, thereby maintaining high degree of cleanliness of the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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