| 摘要 |
PROBLEM TO BE SOLVED: To provide a higher harmonic laser device capable of suppressing an adverse effect due to balance change of a fundamental wave for higher harmonic, and to provide a control method of the higher harmonic laser device. SOLUTION: The higher harmonic laser device comprises: a pair of mirrors which are disposed on both ends of a prescribed optical path and constitute a cavity; an active part which is disposed on the prescribed optical path and generates the fundamental wave of a prescribed wavelength based on an excitation energy; a wavelength conversion element which is disposed on the prescribed optical path and generates the higher harmonic based on the fundamental wave; a first monitor which monitors light quantity of the fundamental wave in leakage light from the prescribed optical path; a second monitor which monitors light quantity of the higher harmonic; and a control circuit which turns off the active part when a first monitor signal from the first monitor becomes excessive for a monitor signal from the second monitor. COPYRIGHT: (C)2008,JPO&INPIT
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