| 摘要 |
PROBLEM TO BE SOLVED: To prevent yawing direction displacement of a table of which movement is stopped even if the center of gravity of the portable mass of a table is not positioned above a ball screw device. SOLUTION: The linear motion device has a structure supporting a slider 12 movably in relation to a guide rail 11 via a lot of balls and is provided with a pair of linear motion guide devices 4, 5 supporting the table 2 movably on a base stand 1, and a ball screw device 6 attached on a section between the pair of linear motion guide devices 4, 5 on the table 2 and moving the table 2, and keeps friction force between a guide rail 11 and a slider of the linear motion guide device 4 of a side where the center of gravity of the table upper mass exists in a view from a mounting section of the ball screw device 6 on the table 2 out of the pair of linear motion guide devices 4, 5 higher than friction force between a guide rail 11 and a slider 12 of another linear motion guide device 5. COPYRIGHT: (C)2008,JPO&INPIT
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