| 摘要 |
A single crystal based leveraged shear mode accelerometer includes a housing base portion with a base portion bottom surface that includes two base metallization areas. A housing top portion is coupled to the housing base portion. A subassembly includes a piezoelectric single crystal positioned between the housing base portion and the housing top portion. The piezoelectric single crystal is held vertical by the base portion and a shear plate bonded with a metal loaded electrical conductive epoxy. The base portion and the shear plate both have machined edges in a vertical direction. These machined edges pointing against an electrically insulating plate and form an active electrical connection at a top surface of the piezoelectric single crystal, and an electrical ground connection at a bottom surface of the piezoelectric single crystal. The subassembly is held to a mass construct with micromachined screws to the base portion, forming an accelerometer assembly in tension.
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