MANAGING METHOD OF PROCESSING AND MANAGING SYSTEM OF PROCESSING

摘要

A process management method and a process management system are provided to enhance process management efficiency by performing an erroneous step detection process within a short period of time. A first to nth wafer processes are sequentially performed within a first to nth process steps(S10). A process for producing a characteristic parameter value is performed to produce a characteristic parameter value for each of the wafers(S20). A process for producing a relational expression is performed to produce a first to nth relational expressions to express relations between the first to nth processes and the characteristic parameter values(S30). A process for producing transformative relational expression is performed to produce a first to nth transformative relational expressions(S40). A decision process is performed to decide pattern characteristics of the first to nth relational expressions(S50).