SALT FOR ACID-GENERATING AGENT OF CHEMICALLY AMPLIFIED RESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a salt functioning as an acid-generating agent giving a chemically amplified resist composition exhibiting high resolution and wide exposure margin.

SOLUTION: The salt is expressed by formula (I) (Q1and Q2are each independently a fluorine atom or a 1-6C perfluoroalkyl group; X is a 1-12C straight or branched-chain bivalent hydrocarbon group; Y is a 1-30C hydrocarbon group which may have substituents; and A+is an organic counter ion).

COPYRIGHT: (C)2008,JPO&INPIT