摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing process of nitrides and oxynitrides which exhibits an excellent reactivity and does not cause uneven discoloration and a difference in nitrization among the products. SOLUTION: The manufacturing process comprises heating a compound expressed by the composition formula: KMO<SB>2</SB>(M is a metal element) and containing at least one kind of metal element selected from among Ga, Ge, Zn, In and Sn in a flow of ammonia. K<SB>2</SB>ZnGeO<SB>4</SB>is heated at 700-1,000°C in a flow of ammonia. Alternatively, KGaO<SB>2</SB>is heated at 700-1,000°C in a flow of ammonia. COPYRIGHT: (C)2008,JPO&INPIT
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