| 摘要 |
PROBLEM TO BE SOLVED: To enable an optical spectroscopic measurements, such as of Raman scattering, at a spatial resolution exceeding a diffractive limit, with regard to a sample having a structure that two types of optically-different materials, such as Si, SiO<SB>2</SB>contact each other via an interface. SOLUTION: Since the optical measurement in the structure, having the interface makes strengths of interactions between excitation light and the sample differ with the relations between the polarization direction of the excitation light and the direction of the interface, this fact is utilized so as to overcome the problem wherein the optical measurement can be conducted at a high spatial resolution. COPYRIGHT: (C)2008,JPO&INPIT
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