| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring a shape of an object, by reproducing the phase information in the measurement objective region of the measurement object. SOLUTION: The method and device for measuring the shape of the object by obtaining a plurality of diffraction image different in the necessary diffraction condition for reproducing phase information, and analyzing these diffraction images includes: a monochromatic light irradiation step of irradiating the object with monochromatic light; a diffraction image taking step of taking diffraction image of the object during the monochromatic light irradiation by the image taking means; an optical path length permutation step of changing the optical path length between the image taking means and the object; and an analysis step of analyzing the plurality of diffraction images taken by the diffraction image taking step by the phase reproducing method. COPYRIGHT: (C)2008,JPO&INPIT
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